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Overview of RGA and RF Sensor Applications

Webinar link: https://attendee.gotowebinar.com/register/1718372154683921680

Presenter: Nathan Graff Applications Development Manager

Overview of RGA and RF Sensor Applications - An introductory course on applications where process and equipment data collected by RGAs and RF sensors can be used to maximize yield and minimize scrap.

RGA Applications

  • Transfer chamber
  • PVD inter-wafer monitoring
  • Air leak detection PVD chamber
  • Degas chamber
  • ALD/PECVD
  • CVD Air leak and end point RF Sensor Applications
  • Endpoint detection Arc Detection applications
  • DC Generator for PVD Tool
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