ALD for Industry 2019

Practical ALD Show (March 19, from 10 - 12 a.m.)
You get practical advice for your ALD process, equipment possibilities and the handling of chemicals. Advanced users present their know-how to support you in process control and practical handling.

ALD system * precursor * vacuum pumps * dry abatement systems * mass spectroscopy

Tutorial (March 19, from 1 - 5 p.m.)
In this educational part distinguished people explain basics of ALD technology to refresh your knowledge and give you more background information.

introduction & history * ALD process for group 13 nitrides * high volume manufacturing * precursors * reactor design * PEALD

Workshop (March 20, 9 a.m. – 7 p.m.)
In the workshop invited talks from leading researchers and industry experts are presented on a broad range of topics. Presentations will focus on the latest topics and the state of the art in the field of Atomic Layer Deposition.

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