From Sensors to Smart Systems

Martin Ebermann

Martin Ebermann

"MOEMS Fabry-Pérot-Filter for Infrared-gas-detection"

Miniature spectral sensors have a great potential for a huge range of applications. They are often considered as a disruptive technology. MOEMS Fabry-Pérot filters are particularly suited for the mid and longwave infrared range, the so called fingerprint region, because they have several advantages with regard to miniaturization and optical throughput. The presentation will give a short summary of the technology, including packaging and system integration. Several devices with different spectral ranges and resolutions will be shown. Applications in gas sensing and industrial process control based on an exemplary selection will be discussed.