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European Advanced Process Control and Manufacturing (apc|m) Conference - Post-Registration for Presentation Download

Artificial Intelligence in Semiconductor Manufacturing

The European Advanced Process Control and Manufacturing (apc|m) Conference is directed to manufacturers, suppliers and scientific community of semiconductor, photovoltaic, LED, flat panel, MEMS, and other related industries. The topics are focused on current challenges and future needs of Advanced Process Control and Manufacturing Effectiveness.

The European Advanced Process Control and Manufacturing (apc|m) Conference is focussed on:


Current challenges and future needs of Advanced Process Control and Manufacturing Excellence

CONFERENCE PROGRAM

The conference program was organized in April 2021 with virtual presentations/talks and poster sessions in parallel

The European apc|m Conference was built around sessions of following topics:

Process Level APC

  • Plasma etch, CVD and ALD
  • Sputtering, P3I, and e--beamLithography
  • Thermal, wet processing & CMP
  • Backend
  • Metrology and R2R
  • APC for legacy tools

Fab Level APC

  • Digitization, data analytics, machine learning & AI, digital twin
  • Fab level process control methods
  • Virtual metrology
  • Yield management
  • Factory data analysis
  • IT infrastructure & Equipment integration trends

Manufacturing Effectiveness and Productivity

  • Unit process & equipment productivity
  • Factory productivity and automation
  • Factory modeling, simulation and optimization
  • Cost optimization and end-of-life equipment issues
  • Environment and Green Manufacturing

Ansprechpartner

René Weber
Silicon Saxony e. V.
Telefon geschäftlich: +49 (0) 351 - 8925 800
Fax: +49 (0) 351 - 8925 889
E-Mail: rene.weber@silicon-saxony.de
http://www.silicon-saxony.de

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