Aktuelle Veranstaltungen

20th European Advanced Process Control and Manufacturing (apc|m) Conference

The 20th European Advanced Process Control and Manufacturing (apc|m) Conference is directed to manufacturers, suppliers and scientific community of semiconductor, photovoltaic, LED, flat panel, MEMS, and other related industries. The topics are focused on current challenges and future needs of Advanced Process Control and Manufacturing Effectiveness.

Schedule
Call for AbstractsJune 01, 2021 - November 30, 2021
Evaluation of abstractsOctober 18, 2021 - November 30, 2021
Preparation of programDecember 1, 2021 - December 05, 2021
Program onlineDecember 06, 2021

The European apc|m Conference will be built around sessions of following topics:

Process Level APC

  • Plasma etch, CVD and ALD
  • Sputtering, P3I, and e--beamLithography
  • Thermal, wet processing & CMP
  • Backend
  • Metrology and R2R
  • APC for legacy tools

Fab Level APC

  • Digitization, data analytics, machine learning & AI, digital twin
  • Fab level process control methods
  • Virtual metrology
  • Yield management
  • Factory data analysis
  • IT infrastructure & Equipment integration trends

Manufacturing Effectiveness and Productivity

  • Unit process & equipment productivity
  • Factory productivity and automation
  • Factory modeling, simulation and optimization
  • Cost optimization and end-of-life equipment issues
  • Environment and Green Manufacturing

Ansprechpartner

Isabel Dietrich
Silicon Saxony e. V.
Telefon: +49 351 89 25 885
Fax: +49 351 89 25 889
E-Mail: event@silicon-saxony.de

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