- Dienstleistung: Sonderleistung
Piezocon-based concentration measurement
- more cost-effective use of precursor chemicals
- tighter delivery control improves performance
- the most sophisticated on-site dopant and precursor gas mixing and delivery systems available
Based on Continuous Wave Cavity-Ring-Down-Spectroscopy (CW-CRDS), we offer dedicated trace analyzers for AMC, moisture, ammonia, methane, oxygen, hydrogen bromide, hydrogen fluoride, hydrogen chloride, formaldehyde, and more. The instruments work in a wide range of matrices, including toxic, corrosive, and hydride gases.
POSAS is also a specialist for in-line monitoring systems of chemical composition, physical properties of wet processes based on IR or UV Technology and In Situ Wafer Temperature Measurement.
Ozone Instrumentation: sensors, analysers, calibrators, destruct units.