SPTS Technologies GmbH
- Zulieferung: Equipment
- Si und Dielectric Etch
- DCVD / MOCVD
- Release Etch mit Dampf HF oder XeF2
- Ofentechnik (LPCVD, Diffusion, Anneal)
- DRIE deep Si etching
SPTS Technologies designs, manufactures, sells, and supports etch, PVD, CVD and thermal capital equipment and process technologies for the global semiconductor and micro-device industries, with focus on the MEMS, advanced packaging, power management, high speed RF device and LED markets. SPTS technologies are available on a range of wafer-handling options applicable to R&D, pilot production, or volume production environments. Comprehensive service and spare parts support are offered through a worldwide network of service centres and qualified local agents.
SPTS offers a range of Omega® etch systems including market-leading Si DRIE technology, dielectric etching, and ICP etch, in addition to Primaxx® and Xactix® dry vapour release etch processes for MEMS using HF or XeF2
SPTS supplies Sigma® PVD and Delta® PECVD systems for depositing metals and dielectrics for a range of applications within MEMS, advanced packaging, LEDs, RF-ICs and power devices.
SPTS offers both new and factory-certified remanufactured LPCVD/Diffusion systems, as well as custom system conversions to meet specific engineering requirements. SPTS is also the sole owner of all IP related to the WJ APCVD product line.