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SPTS Technologies GmbH

SPTS Technologies GmbH

  • Equipment
  • Zulieferung: Equipment
  • PVD
  • Si und Dielectric Etch
  • Release Etch mit Dampf HF oder XeF2
  • Ofentechnik (LPCVD, Diffusion, Anneal)
  • DRIE deep Si etching

SPTS Technologies designs, manufactures, sells, and supports etch, PVD, CVD and thermal capital equipment and process technologies for the global semiconductor and micro-device industries, with focus on the MEMS, advanced packaging, power management, high speed RF device and LED markets. SPTS technologies are available on a range of wafer-handling options applicable to R&D, pilot production, or volume production environments. Comprehensive service and spare parts support are offered through a worldwide network of service centres and qualified local agents.

Etch Products
SPTS offers a range of Omega® etch systems including market-leading Si DRIE technology, dielectric etching, and ICP etch, in addition to Primaxx® and Xactix® dry vapour release etch processes for MEMS using HF or XeF2

Deposition Products
SPTS supplies Sigma® PVD and Delta® PECVD systems for depositing metals and dielectrics for a range of applications within MEMS, advanced packaging, LEDs, RF-ICs and power devices.

Thermal Products
SPTS offers both new and factory-certified remanufactured LPCVD/Diffusion systems, as well as custom system conversions to meet specific engineering requirements. SPTS is also the sole owner of all IP related to the WJ APCVD product line.

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