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SPTS Technologies GmbH

SPTS Technologies GmbH

Business Segments:
  • Equipment
Core Competences:
  • Supplier: Equipment
Specialisation:
  • PVD
  • Si and Dielectric Etch
  • DCVD / MOCVD
  • Release Etch mit Dampf HF oder XeF2
  • Ofentechnik (LPCVD, Diffusion, Anneal)
  • DRIE deep Si etching
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