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Business Segments:
  • Semiconductor Industry
  • Medical Technology / Pharma
  • Biotechnology
Core Competences:
  • Supplier: Materials
  • Flow Rate Measurement
  • Air Bubble Detection
  • Flow-Bubble Measurement
  • Level Detection

SONOTEC - Ultrasonic Solutions
Founded in 1991, SONOTEC GmbH has developed into one of the world's leading product and solution specialist for innovative measurement technologies. With more than 170 employees and a modern corporate structure comprising three independent business units - Preventive Maintenance, Nondestructive Testing and Non-invasive Fluid Monitoring - the technology leader operates its global sales activities from the Halle (Saale) based German headquarter. The distributed portfolio includes customized ultrasonic transducers and sensors as well as testing devices and measurement solutions for a variety of different industries.

Non-Invasive Fluid Monitoring in the Semiconductor Industry
In the semiconductor industry the compact sensors from SONOTEC play an important role in wafer manufacturing. In different wet processes several abrasive, adherent, and corrosive liquids are used. The advantage of the sensors here is that their measurement is non-invasive and non-intrusive and therefore is ideal to both measure flow and detect air bubbles.

Advantages of Non-Invasive Measurement

  • Contact- and contamination-free process monitoring
  • Applicable for a wide range of media
  • Simple tube insertion
  • Simple retrofit
  • No equipment downtime in case of sensor exchange
  • No risk of leakages
  • No wear and tear
  • Improved and more reliable plant productivity and therefore improved yield

SEMIFLOW CO.65/080 V2.0 (Credits: SONOTEC GmbH)
SEMIFLOW CO.65/080 V2.0 (Credits: SONOTEC GmbH)
Flow Measurement in the Semiconductor Industry
If a cleaning solution is under- or overdosed, additional resources are required, since the cleaning process needs to be repeated. At worst, the wafers must be discarded and a huge loss in value is incurred. A precise flow measurement is therefore decisive for an efficient use of the production resources.

SEMIFLOW CO.65 - Sensors in the SEMIFLOW series are specifically designed for applications in the semiconductor industry and are characterized by a number of essential features
  • Highly precise and contact-free measurement
  • 8 sensor sizes (¼", 3/8", ½", (¾"), 1", 1 ¼“, 40A, 50A OD) for a wide range of tube sizes
  • Version for the application in hazardous environments (Ex Zone 1)
  • Plastic housing (PVCC) and plastic connector (PA)
  • Screwed lid and flexible inlay for an optimal coupling between tube and transducer
  • No external electronics for a compact design and simple handling
  • Customer calibration for different flow rates

Air Bubble Detection in the Semiconductor Industry
The presence of air bubbles in critical processes can have extensive consequences in wafer manufacturing. In photolithography the occurrence of air bubbles in photoresist may cause a defect of the wafers; air bubbles in process coolant may lead to an interruption of production processes. A timely detection of air bubbles is therefore crucial to achieve production targets.

SONOCHECK ABD06 - Air bubble detectors for applications in industrial environments are characterized by a number of significant advantages
  • Non-invasive measurement
  • No coupling medium required
  • Built-in electronics, no external electronic board required
  • CE certified
  • ATEX certified (optional)
  • IP67
  • No wear and tear
  • Optional software for easy parameterization and testing

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