List of all Members
ProTec Carrier Systems GmbH
- Semiconductor Industry
- Equipment
- Electronic
- Photovoltaics
- Supplier: Equipment
- Electrostatic Chucks
- Transferable ElectroStatic Carrier (T-ESC)
- Thin glass, wafers and foils handling and processing
ProTec Carrier Systems GmbH
Birlenbacher Straße 19-21
57078 Siegen / Deutschland
+49 271 89041-0
+49 271 89041-19
http://www.protec-carrier.com
YouTube
Reference Person: Sebastian Wagner
+49 271 89041-16
+49 271 89041-19
In contrast to mechanical or vacuum-supported clamping devices electrostatic clamping systems work optimally under temperature up to 400°C and in vacuum environment. The electrostatic clamping technology has proven to be a serious candidate solving following problems:
• Full-area clamping force
• Freely-adjustable force regulation
• Bow elimination
• Edge protection
• No partial occlusion of active surface
• Homogeneous thermal transfer between substrate and substrate holder
• Backside gas cooling technique (BSGC)
• Upside-down deposition
• Adapter function: fixing of several substrates on single substrate holder
• “Sandwich Chucking” with masks
• Customized materials, shapes and sizes