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Plasmetrex GmbH

Plasmetrex GmbH

Business Segments:
  • Semiconductor Industry
  • Equipment
  • Photovoltaics
Core Competences:
  • Supplier: Process service
  • Physical Metrology
  • Plasma Technology
  • Plasma Monitoring

Plasmetrex GmbH
plasma metrology experience
Schwarzschildstr. 3
12489 Berlin / Deutschland

+49(0)30 6392 5040
+49(0)30 6392 5041

Reference Person: Dr. Michael Klick
030 6392 5043
030 6392 5043

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The corporate philosophy of Plasmetrex is the development, manufacturing and sale of control and diagnostic systems (Hardware/Software) for production control of plasma processes associated with a production based qualification of engineers and technicians.
The business segments are plasma metrology equipment for etch and deposition in semiconductor manufacturing for high-end plasma metrology, large chamber plasma control in photovoltaic and display manufacturing and low cost plasma control for surface treatment. In the service and consulting area the Plasmetrex provides qualification of process and maintenance engineers of IC manufacturing and offers customized consulting for process, equipment, and metrology. Find detailed information at

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