Meyer Burger (Germany) GmbH
- Semiconductor Industry
- Chip manufacturing: Chips, Displays; MEMS/MOMS, Sensors
- Surface Coating
- Surface Modifying
- Process Equipment
- Plasma Technologies
Meyer Burger (Germany) GmbH is a worldwide supplier of systems for the realization of plasma processes. The modular design of the systems enables flexible adaptation to various surface treatment methods, such as plasma-assisted deposition of metallic and/or dielectric layers (PECVD and PVD) or reactive ion etching (RIE). This range of systems is further supplemented by variably configurable continuous furnaces.
The systems are mainly used in the photovoltaics industry, the semiconductor industry, precision optics and sensor manufacturing as well as in laboratory applications. Further fields of application can be found in the automotive industry and in the field of glass coating.
The systems can be modularly configured for the processing of areas from a few cm² to well over 100 m² per hour. In addition to individual substrates, it is also possible to process strips using the roll-to-roll process.
In order to meet the highest demands on the quality of system production, the systems can be manufactured in a production clean room. A broad base of permanently installed systems in a technology center also ensures fast and unerring development of customer-specific machines, as this provides the opportunity for immediate testing of components and processes.
Furthermore, the company has maintained customer relationships with renowned industrial and university research institutes for many years.