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Freiberg Instruments GmbH

Freiberg Instruments GmbH

Business Segments:
  • Software
  • Semiconductor Industry
  • Medical Technology / Pharma
  • Environmental Technoloy
  • Equipment
  • Electronic
  • Photovoltaics
  • Biotechnology
Core Competences:
  • Supplier: Equipment
  • Physical Metrology
  • Test Equipment
  • Metrology
  • Defekt Analytic

Products and Services:

The objective of the company is the development and production of a new family of state of the art contact less and non destructive inline measurement tools for the semiconductor industry and research facilities.
These measurement techniques open for the first time the possibility to measure electrical parameters such as lifetime, diffusion length and mobility of charge carriers with so far not achieved sensitivity. This allows for a combination of high spatial resolution, high measurement speed even at very low injection levels. These unusual combination of properties make the methods ideally suited for inline applications. Again owing to the high sensitivity, it is even possible to expand the measurements to the investigation of thin epitaxial layers as found in device fabrication. A special kind of these techniques allows for contact less, non destructive and topographic investigations of defect properties.
A large variety of semiconductor materials can be investigated. Many processing steps can be followed ranging from the preparation of the starting material till to the final device ready for packaging.

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