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SENTECH Instruments GmbH

SENTECH Instruments GmbH

Business Segments:
  • Semiconductor Industry
  • Equipment
Core Competences:
  • Supplier: Equipment
  • Thin Film Metrology
  • Plasma Etching
  • Plasma Deposition
  • Customized Solutions
  • Atomic Layer Deposition (ALD)
  • Measurement Technology

SENTECH Instruments GmbH
Schwarzschildstraße 2
12489 Berlin / Deutschland


Reference Person: Dr. Helmut Witek
030 639255 20
030 639255 22

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SENTECH Instruments develops, manufactures, and sells worldwide advanced quality instrumentation for Plasma Process Technology, Thin Film Measurement, and Photovoltaics.
The medium-sized company founded in 1990 has grown fast over the last decades and has today 60 employees. SENTECH is located in Berlin, capital of Germany, and has moved to its own premises in 2010 in order to expand its production facilities.

SENTECH plasma etchers and deposition systems including ALD support leading-edge applications. They feature high flexibility, reliability, and low cost of ownership. SENTECH’s plasma products are developed and manufactured in-house and thus allow for customer-specific adaptations. More than 300 units have been sold worldwide to research facilities and industry for applications in nanotechnology, micro-optics, and optoelectronics.

SENTECH offers a broad range of spectroscopic ellipsometers, laser ellipsometers, and reflectometers for the measurement of thickness and optical constants on thin films and layer stacks. By selling more than 1,500 measurement units, SENTECH has become one of the world leaders in thin film metrology. It is especially successful in photovoltaics with measurement solutions for the development and manufacturing of crystalline silicon and thin film solar cells.

SENTECH Instruments effectively serves a worldwide customer base and is well established in advanced technology markets. A global distribution network of 20 experienced and highly qualified partners plus SENTECH’s own service office in Asia provide quick and efficient customer service. Best application support is given by SENTECH’s application experts who operate in application laboratories for thin film measurement and plasma process technology that cover an area of more than 150 m2.

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