Company type
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Center for Microtechnologies
Research institution
Target markets
Electronics·Life Science·Machinery and Equipment
Industries
Research & Development
Portfolio
Aerospace·Applications·Colleges / Universities·Communication·Electronic·Medical Technology / Pharma·MEMS·Micro- / Nanoelektronics·Rail / Automotive·Semiconductor Industry·Smart Systems
Certificates
Contact
Reichenhainer Straße 70
09126 Chemnitz
09126 Chemnitz
Contact Person
Prof. Dr. Harald Kuhn
0371 531 33009
Direktor des ZfM, Professor für Smart Systems Integration
About this member
The Center for Microtechnologies is a scientific research unit of the Faculty of Electrical Engineering and Information Technology at Chemnitz University of Technology. It is a reliable partner in basic research, R&D projects and direct research and development contracts for industry. The current focus of our research fields is on:
- 1D/2D Nanodevices
- MEMS Technologies and Devices
- Advanced Micro and Nano Patterning
- Spintronics and Interconnect Systems
- Simulations in Nano Technology
- Molecular-based micro and nano systems
- Photonics/MOEMS
- Nano-Packaging
- Miniaturized plasma systems
- Digital Twins in Semiconductor Production
The Center for Microtechnologies has clean rooms with an area of about 1000 m2 (300 m2 of which are clean room class ISO 4) and the corresponding equipment for processing and characterization of wafers with diameters of 100 mm, 150mm and 200mm. A modern and extensive infrastructure with industry-related processes enables smallest structure dimensions down to 20 nm for nanostructuring.
Services:
- Development of material, technology and functional demonstrators
- Manufacturing of prototypes and small series
- Technology transfer to customers or foundries
- Education of students and PhD students
Micro and Nano technologies for MEMS/NEMS
The Center for Microtechnologies of the Faculty of Electrical Engineering/Information Technology at TU Chemnitz works on the technology development of MEMS, MOEMS and NEMS. It works closely with Fraunhofer ENAS to jointly realize complex process chains. The individual processes as well as the technology sequences are continuously developed and adapted to new requirements.
